SUSS MicroTec SE, a leading supplier of semiconductor equipment and process solutions, announced on October 1, 2026, its entry into the wafer-level cleaning market with the launch of the GreenTec Solutions product line and its first system, the GT200. The move expands SUSS' technology portfolio into a market valued at approximately EUR 5.4 billion, driven by advanced packaging, heterogeneous integration, and rising semiconductor demand from AI and high-performance computing applications.
"GreenTec Solutions marks an important milestone in the execution of our Ambition 2030 strategy," said Burkhardt Frick, CEO of SUSS. "By expanding into wafer-level cleaning, we are entering an attractive market with significant long-term growth potential while leveraging proven technologies and process expertise from our existing portfolio." The GreenTec approach combines the company's TurbulenStrip and CrustBuster technologies, originally developed for photomask processing, into a hybrid platform that enables efficient resist and residue removal with reduced chemical consumption and without hazardous acids or organic solvents.
The GT200 is designed for research and development, process qualification, and production in 200 mm manufacturing environments for MEMS, RF, power device, and CMOS applications. More information about the GT200 can be found at https://www.suss.com/en/products-solutions/greentec-solutions/wafer-cleaning/gt200.
This launch matters because it addresses the semiconductor industry's growing need for sustainable manufacturing solutions that reduce environmental impact and cost. By eliminating hazardous chemicals and lowering chemical consumption, SUSS helps customers meet ESG targets and lower overall cost-of-ownership. The company supports adoption through joint evaluation programs, process co-development, and recipe optimization services.
SUSS plans to expand the GreenTec portfolio with a dedicated 300 mm high-volume manufacturing platform in 2027, followed by a 200 mm HVM platform in 2028. "Due to the strong interest from our customers, we are pulling in the launch of a 300 mm HVM solution," said Yuta Nagai, Senior Vice President Photomask Solutions at SUSS. This provides customers a clear migration path from evaluation to full-scale production. The company will showcase the latest developments at SEMICON West; registration details are available at https://www.suss.com/en/company/events/semicon-west.
For more information about SUSS, visit www.suss.com. The original release is available at www.newmediawire.com.
